Description
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
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isa:5167088
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An Entity of Type :
prov:Entity
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webisa.webdatacommons.org
associated with source
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Type:
prov:Entity
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rdf:type
prov:Entity
prov:value
For via formation using photosensitive polymers such as benzocyclobutene (BCB), development is an extremely important step, and insuring adequate time for the completion of polymer dissolution is the key to defining the desired via pattern.
prov:wasQuotedFrom
ieee.org
is
prov:wasDerivedFrom
of
isap:354516464
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