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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • 20120314993BURIED-TYPE OPTICAL INPUT/OUTPUT DEVICES AND METHODS OF MANUFACTURING THE SAME - Optical input/output (I/O) devices, which include a substrate including a trench, a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide.
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