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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Apparatus according to claim 3, 4 or 5, including a test strip disposed in said recess in said setting range being carried along on said drum after deposition of each layer, and means disposed outside of the vapor deposition area, for measuring layer thickness with said test strip.
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