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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • First, starting with a two-layer tape comprising a film made of an insulating material such as polyimide and a conductive layer formed by sputtering or plating on the upper surface of the film, an opening whose upper end is closed with the upper conductive layer is formed in the insulating layer by selectively etching the lower surface of the film.
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