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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • film including metal, nitrogen and carbonUS7541283 *Feb 28, 2005Jun 2, 2009Tokyo Electron LimitedPlasma processing method and plasma processing apparatusUS7576012Feb 21, 2006Aug 18, 2009Micron Technology, Inc.Atomic layer deposition methodsUS7638167Jun 4, 2004Dec 29, 2009Applied Microstructures, Inc.vapor-phase depositionUS7691742Feb 4, 2009Apr 6, 2010Applied Materials, Inc.Atomic layer deposition
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