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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • film having desired characteristics if the semiconductor thin film is melted and solidified by a melt growth crystallization process using a laser beam having an energy density exceeding a certain threshold energy density, even if the energy of the laser beam is increased gradually so that the volatile substance, such as hydrogen, contained in the semiconductor thin film may not evaporate rapidly
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