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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • forming a layer including a compound comprising silicon, oxygen, and nitrogen over a substrate that has a plurality of electrically conductive structures and/or over a part of a surface of the electrically conductive structures, the layer including a compound comprising silicon, oxygen, and nitrogen being formed using a plasma-enhanced chemical vapor deposition process with nitrogen being supplied
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