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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • forming a semiconductor film over a substrate having an insulating surface; crystallizing said semiconductor film; forming at least first and second thin film transistors using said semiconductor film arranged in a line, each of said first and second thin film transistors having an active region including source and drain regions and a channel region interposed therebetween; irradiating said sourc
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