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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Another embodiment provides a method of fabricating a semiconductor structure, including providing a silicon wafer with a surface; depositing regions of GexSi1???x to the surface of the silicon wafer; and depositing silicon to the surface such that the deposited GexSi1???x regions are integrated within silicon.
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