About: http://webisa.webdatacommons.org/135316067

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention is concerned with the response of thin films to an applied stress, including stresses that result in plastic flow of the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com