About: http://webisa.webdatacommons.org/248299301

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ltd.Method and apparatus for fabricating metal layerUS724722328 Apr 200324 Jul 2007Semitool, Inc.Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesUS727907916 Jul 20039 Oct 2007Dainippon Screen Mfg.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au