About: http://webisa.webdatacommons.org/262626453

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film containing hydrogen may be formed of an insulating film mainly containing carbon or silicon nitride by a PCVD method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com