About: http://webisa.webdatacommons.org/308474238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another reactant is hydrogen bearing and preferably contains another species desired in the layer being deposited, particularly nitrogen or carbon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca