| http://www.w3.org/ns/prov#value | - A method of forming a deposition on a substrate, including the steps of: depositing a first barrier layer on the substrate, forming a groove in the first barrier layer, the groove being defined by walls, depositing a layer of a conductive material on the walls defining the groove, depositing a second layer of a barrier material on the layer of the conductive material, the second layer having prope
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