About: http://webisa.webdatacommons.org/88466844

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 1A and 1B illustrate generally at 10 a microactuator in accordance with one embodiment for use as a valve in controlling the flow of a fluid, such as a gas or liquid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk