About: http://webisa.webdatacommons.org/116607856

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, what is desired is a method and an apparatus for probing active regions in CMOS integrated circuits through the back side of silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca