About: http://webisa.webdatacommons.org/147869540

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exposure mask has light shielding portions 752 a, 752 b, and 752 c formed of metal films such as Cr and a portion provided with semi-transmissive films 751 a, 751 b, and 751 c as an auxiliary pattern.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au