About: http://webisa.webdatacommons.org/166946417

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material gas for fabricating diamond thin films comprises hydrogen gas, compound gas including carbon, and dopant gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com