| http://www.w3.org/ns/prov#value | - That is to say, after forming the electric field adjusting region 14, a photo-resist is applied on the surface, portions of the applied photo-resist corresponding to the electrodes 15, 16a and 16b are selectively removed, an electrode material such as Au is deposited by an electroplating to have a thickness t of 10 ??m, and finally the photo-resist is removed.
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