About: http://webisa.webdatacommons.org/226104499

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 10, wherein the layer including carbon is deposited at a temperature of between approximately 250??? and 800??? C. and a pressure of between approximately 2 and 30 torr.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr