About: http://webisa.webdatacommons.org/420297417

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, chamber 10 includes a gas source 20 wherein gas source 20 can introduce non-oxidizing gases such as nitrogen and hydrogen into chamber 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es