About: http://webisa.webdatacommons.org/453829020

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, an anti-oxidation film such as silicon nitride (Si3 N4) film or the like is formed on the areas except the portion where the field oxide film 12 is formed, and is oxidized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com