@prefix skos:	<http://www.w3.org/2004/02/skos/core#> .
@prefix isac:	<http://webisa.webdatacommons.org/concept/> .
isac:_lithography_	skos:broader	isac:patterning_method_ .
isac:_photolithography_	skos:broader	isac:patterning_method_ .
isac:patterning_method_	skos:broader	isac:patterning_method_ .