@prefix skos:	<http://www.w3.org/2004/02/skos/core#> .
<http://webisa.webdatacommons.org/concept/substrate+processing_apparatus_>	skos:broader	<http://webisa.webdatacommons.org/concept/substrate+processing_method_> .
<http://webisa.webdatacommons.org/concept/substrate+processing_method_>	skos:broader	<http://webisa.webdatacommons.org/concept/substrate+processing_method_> .