@prefix skos:	<http://www.w3.org/2004/02/skos/core#> .
@prefix isac:	<http://webisa.webdatacommons.org/concept/> .
isac:semiconductor_wafer_	skos:broader	<http://webisa.webdatacommons.org/concept/substrate+processing_system_> .
<http://webisa.webdatacommons.org/concept/substrate+processing_apparatus_>	skos:broader	<http://webisa.webdatacommons.org/concept/substrate+processing_system_> .
isac:process_chamber_	skos:broader	<http://webisa.webdatacommons.org/concept/substrate+processing_system_> .