About: http://webisa.webdatacommons.org/100168060

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Gases (i.e., process and other gases) that enter the process chamber 100 through the mixing block 134 are first diffused by the blocker plate 136 as the gases fill the space 122 behind the showerhead 118.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com