About: http://webisa.webdatacommons.org/100384873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wear resistant material is then deposited on the core using such techniques as sputtering or CVD. Material thus deposited at the tip of the micro-probe 24 is removed by anisotropic etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com