About: http://webisa.webdatacommons.org/100839672

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a new method for providing an oxide film of a material on the surface of a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com