About: http://webisa.webdatacommons.org/10098464

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, a high density TaOx on a Ta gate can be formed to reduce defects such as pin holes and to improve yield.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com