About: http://webisa.webdatacommons.org/101152390

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate and the polishing pad are typically exposed to the polishing composition and contacted for a period of time between about 5 seconds and about 30 seconds, such as about 20 seconds.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es