About: http://webisa.webdatacommons.org/10122292

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, one or more targets 156, 158, 160, and 162 may be disposed above substrates 114 and/or carriers 122 in processing chamber 96 if, for example, processing chamber 96 is a sputtering chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com