About: http://webisa.webdatacommons.org/101290901

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dopants are then activated by conducting laser annealing or other millisecond-scale annealing of the implanted extension regions either prior, during, or after a Rapid Thermal Anneal (RTA).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com