PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • P(OR)3, AsX3, AsR3, As(OR)3, SbX3, SbR3, Sb(OR)3, NHxR3???x, CNR, and RCN, wherein R is an organic group and X is a halogen; y=1 to 4; z=1 to 4; x=0 to 3; providing a precursor composition that includes one or more platinum complexes; and forming a platinum-iridium-containing film from the precursor compositions on a surface of the substrate (preferably, the semiconductor substrate or substrate as
http://www.w3.org/ns/prov#wasQuotedFrom
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