About: http://webisa.webdatacommons.org/101337482

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to carrier assemblies, polishing machines including carrier assemblies, and methods for mechanical and/or chemical-mechanical polishing of micro-device workpieces.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com