About: http://webisa.webdatacommons.org/10139180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the high-K dielectric material may be deposited by LPCVD, RTCVD, MOCVD or ALCVD. In addition, the high-K dielectric material may be deposited by other methods such as CVD, PVD and sol-gel.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca