PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • More specifically, FIGS. 6A-6D show a case where linear laser light having a trapezoidal energy density profile which is emitted from a pulsed laser light source such as an excimer laser is moved in the scanning direction by a pitch D for each shot of irradiation.
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