| http://www.w3.org/ns/prov#value | - In the first to third embodiments, although the insulating layers 41, 70, 124 may contain the epoxy resin containing a carbon black, etc., use may be made of an epoxy resin not containing any carbon black for instance so long as the epoxy resin is of such a type as to adequately absorb the laser beam from the excimer laser.
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