| http://www.w3.org/ns/prov#value | - In another embodiment, first electrode 202 is a dedicated contact electrode comprising TiN, TaN, TiAlN, TiSiN, TaSiN, or TaAlN. First electrode 202 is laterally surrounded by insulation material 208a, such as SiO2, SiOx, SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material, to electrically isolate firs
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