About: http://webisa.webdatacommons.org/102290156

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, there is a portion where the metal films 96 and 97 are in contact with the second interlayer insulating film 7 over the side of the contact hole.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au