About: http://webisa.webdatacommons.org/102416235

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, anisotropic etching of dielectric materials, such as silicon oxides or silicon nitrides, is accomplished with C2F6 and CHF3 based feedstock and their mixtures with He and O2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com