About: http://webisa.webdatacommons.org/102596781

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	metal film such as Au or Ag can catalyze the etching reaction with the silicon
http://www.w3.org/ns/prov#wasQuotedFrom	google.com