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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	materials include silicon, polysilicon, various metals, and dielectrics such as silicon nitride, silicon oxynitride, and metal nitrides such as tungsten nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com