About: http://webisa.webdatacommons.org/102733027

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As this first interlayer insulating film 1155, an inorganic insulating film mainly containing silicon may be employed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr