About: http://webisa.webdatacommons.org/102747626

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As such, the defect knowledge database process 216 becomes a repository of wafer defect data, images, or other information from a potential vast array of different defect source identifier clients 104.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com