About: http://webisa.webdatacommons.org/102772265

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As merely an example, nitrogen implantation has parameters including a dose ranging from about 1013 to 1015 atoms/cm3.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es