About: http://webisa.webdatacommons.org/102911737

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view showing a pattern of a semiconductor device of the present invention manufactured by the method shown in FIGS. 4A to 4F;
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com