| http://www.w3.org/ns/prov#value | - Dissimilar areas 182??? and 186??? indicate a disruption in the continuity of trench 30??? along crack 48 as shown in FIG. 12B. The nitride trench integrity analysis test is capable of detecting very fine forms of ECC and miscut defects in a trench which are not detectable by methods such as edge detection.
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