About: http://webisa.webdatacommons.org/103091346

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is an axial vertical cross-section of a preferred embodiment of the presently invented Penning sputter source having a circular target;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com