About: http://webisa.webdatacommons.org/103146549

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sidewall spacers are not known to be used on the sides of metal lines that interconnect the devices or other lines or to control etching of barrier layer after forming interconnect lines thereon, e.g., by additive deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au