About: http://webisa.webdatacommons.org/103425913

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with another aspect of the invention, the chuck is an electrostatic chuck and the production wafer is electrostatically clamped to the chuck.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca